We offer processes to produce NF3 from 99.9% purity to > 99.995% purity for use in electronic fabs for chamber cleaning and etching applications. We can offer you a complete plant design, skidded sections of the plants or a turnkey plant. We offer NF3 production rates up to 1000 MTPY or more.
Associated technologies and equipment we offer are:
- Ammonia purification for feed to NF3 plant
- High purity ammonia (6N purity) for supply to customers
- NF3 compression and packaging into cylinders and tube trailers
- De-bottleneck NF3 plant for increased NF3 production
- Waste handling options from NF3 plant