We offer processes to produce NF3 from 99.9% purity to > 99.995% purity for use in electronic labs for chamber cleaning and etching applications. We can offer you a complete plant design, skidded sections of the plants or a turnkey plant. We offer NF3 production rates up to 1000 MTPY or more.
Halide Group, Inc. 930 Hamilton Street; 4th Floor Allentown, PA 18101 info@halidegroup.com