NF3 Production


We offer processes to produce NF3 from 99.9% purity to > 99.995% purity for use in electronic labs for chamber cleaning and etching applications. We can offer you a complete plant design, skidded sections of the plants or a turnkey plant. We offer NF3 production rates up to 1000 MTPY or more.


Associated technologies and equipment we offer are:


  • Ammonia purification for feed to NF3 plant
  • High purity ammonia (6N purity) for supply to customers
  • NF3 compression and packaging into cylinders and tube trailers
  • De-bottleneck NF3 plant for increased NF3 production
  • Waste handling options from NF3 plant

Halide Group, Inc.   930 Hamilton Street; 4th Floor     Allentown, PA 18101